| Name | Miss Xin Kang |
|---|---|
| Organization or Institution | University of Florida |
| Topic | Inorganic Chemistry |
| Title | Ru olefin carbonyl complexes as organometallic precursors for focused electron beam-induced deposition |
| Author(s) | Xin Kang, Atul Chaudhary, and Lisa-McElwee White |
| Author Institution(s) | Department of Chemistry, University of Florida, Gainesville, Florida 32611-7200 |
| Abstract | Focused electron beam-induced deposition (FEBID) is a 3-D direct-write, maskless nanofabrication technique that is used to directly deposit highly precise nanostructures for a variety of applications such as nanodevices, probe-sensors, and plasmonics. Focused electron beams dissociate the organometallic precursors, which results in the removal of volatile components while the non-volatile residue remains as the deposit. In this work, ruthenium-based olefin complexes were synthesized as potential FEBID precursor candidates and pre-screened for FEBID by determination of their volatility and elucidation of their fragmentation processes by mass spectrometry. |
