Metal olefin carbonyl complexes as organometallic precursors for focused electron beam-induced deposition

Atul Chaudhary, Xin Kang, and Lisa-McElwee White

University of Florida

Focused electron beam-induced deposition (FEBID) is a direct-write nanofabrication technique that enables the direct deposition of complex 3-D nanostructures with high spatial resolution. In this technique, focused electron beams are directed toward precursor molecules which are physisorbed onto the substrate, resulting in the dissociation of the precursor and formation of the deposit. Utilizing labile ligands such as carbonyl and electron-withdrawing olefin groups in the precursor can influence the metal content in the deposits.  This work illustrates the design, synthesis, and characterization of iron and ruthenium-based olefin complexes as FEBID precursor candidates.  Further, the dissociation mechanism associated with the electron-induced reactions is studied via gas phase mass spectrometry.